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: Broad conceptual overview of integrated circuit (IC) processing flows.
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by Stephen A. Campbell is available in digital format through academic retailers like Oxford University Press and Alibris. This updated textbook covers silicon-based technologies, GaAs, and GaN processes with expanded worked examples and simulation integration. Purchase or rent the digital version directly from Oxford University Press Oxford University Press Fabrication Engineering at the Micro- and Nanoscale - Ebook It allows you to instantly find equations for
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In-depth treatment of FinFET (Trigate) CMOS for 22-nm nodes and beyond, as well as nanoscale CMOS practiced at the 45-nm node.
